"Capteur Inertiels".

Téléchargement

!"#$%&'()*+%',%-().)/"(%)0%)

1213)

4*5*$'*)6"-"789)

3955"*'%)

• ;'*+<*#%)0%)=9+<,9++%5%+$)0%()<"#$%&'()

*+%',%-()

• !95#9("+$%()0%()<"#$%&'()*+%',%-(>)

– ?@(9+"$%&'())

– A'"+(0&<$%&'())

– B+$%'="<%()@-%<$'*C&%()

• ;'@(%+$",9+)0&)5*+*D#'9E%$)F)<9+<%#,9+)

0G"<<@-@'95H$'%)I)

;'*+<*#%)0%)<"#$%&')*+%',%-))

• K%()<"#$%&'()*+%',%-()<"'"<$@'*(%+$)0%()

#L@+95H+%()-*@().)0@#-"<%5%+$).)M*$%((%)

M"'*"/-%)N"<<@-@'",9+O)%$).)-")P'"M*$",9+Q))

• 2R%5#-%)>)"<<@-@'95H$'%)NM9*$&'%S)"M*9+TOS)

P7'9(<9#%)N9'*%+$",9+)0&)M%<$%&')0%)<L"5#)

P'"M*$",9++%-O))

• U&)<V&')0%)<"#$%&')*+%',%-)>)&+%)5"((%))

;'*+<*#%)0%)<"#$%&')*+%',%-))

• X+%)5"((%)>)&+%)(9&'<%)0%)-")=9'<%)0G%+$'@%)

• !"#$%&')0%)P'"M*$",9+>)!Y5"#

• !"#$%&')0G"<<@-@'",9+)>)!YD5$##

• %&'#($)*&+,'#-.&,/&0'#1&'+,&.*#0$#23,(&#!#

;'*+<*#%)0%)<"#$%&')*+%',%-)

• !955%+$)5%(&'%')&+%)=9'<%)[))

– KG"((9<*%').)&+)'%((9'$)

– 1%(&'%')-")0@=9'5",9+)0&)'%((9'$)N#'*+<*#%)0G&+%)

/"-"+<%O))

!# 8)

R) \)

RY]^8)

;'*+<*#%)0%)<"#$%&')*+%',%-)

• 2($D<%)&+)'@(9+"$%&')[)

)

• `&*)a)3"<L"+$)C&%))))))))))))))))))))))S)9+)")RYaext/ω02)

• Plus)ω0)est)grand,)plus)x)est)pe4t)

!# 8)

R) \)

x=F/k=maext/k)

0=k/m

;'*+<*#%)0%)<"#$%&')*+%',%-)

• c'&*$)0"+()-%()"<<@-@'95H$'%(>)-*5*$%()

#L7(*C&%().)-")'%(9-&,9+)

• 4"+()&+%)/"+0%)0%):)deS)-%)'Q5Q(Q)0%)-")=9'<%)

0%)/'&*$>)

• ;9&')-G"<<@-@'",9+>))

• =\YJWQf)8deS)5YJQJ%D:\)8PS)gY_>)

))))"+S'5(YZQh%DW)5^(J)9&)\Q_5"^de:^J)

n=4kbT

an,rms =4kbT

;'*+<*#%)0&)<"#$%&')*+%',%-)

• B-)(G"P*$)09+<)0%)5%(&'%')-%)0@#-"<%5%+$)a))

• K*%+)%+$'%)-%)0@#-"<%5%+$)%$)-G"<<@-@'",9+)[)

K")-9*)0%)i%j$9+)@<'*$%)0"+()-%)'%#H'%)-*@)"&)

(&##9'$)0%)-")5"((%)59/*-%)Nx)(&')-%)$'"+(#Q)

#'@<@0%+$O))

• 4"+()-%)095"*+%)0%)K"#-"<%>))

)

−kx −



x+F=m

x, où F=−maext ou F=mg

x(p)

F(p)

p+mp2,

;'*+<*#%)0&)<"#$%&')*+%',%-)

• 3<L@5")%+)/9&<-%)9&M%'$%)>)

• 3<L@5")%+)/9&<-%)=%'5@%)>)))

1"((%k'%((9'$)

N'@(9+"$%&'O)

]9'<%))

0G%+$'@%) 4@#-"<%5%+$) l)

!"#"<*$@) !)

A%+(*9+)

1"((%k'%((9'$)

N'@(9+"$%&'O)

2''%&')0%)

)$'"*+"P%) l) !)

!"#"<*$@) !) X)

]) X)

]9'<%))

0G%+$'@%)

]9'<%)0%)<9+$'%D'@"<,9+)

4%#-Q) !9''%<$%&')

N;BS);B4TO)

`&$)

;'*+<*#%)0&)<"#$%&')*+%',%-)

• !9+M%'(*9+)F)#9(*,9+D$%+(*9+)I)>)<"#"<*,M%)9&)

#*@e9@-%<$'*C&%)

• i95/'%&(%()$%<L+*C&%()0%)5%(&'%)0%)-")<"#"<*$@)n)<=Q)

#-&()-9*+)

• c9&<-%)9&M%'$%)9&)/9&<-%)=%'5@%)[)c9&<-%)=%'5@%)a)

;9&'C&9*)[))

– A9&()-%()/*%+="*$()0%)(7($H5%()%+)/9&<-%)=%'5@%)n)

"5@-*9'",9+)0%)-")-*+@"'*$@S)0%)-")/"+0%)#"(("+$%S)0%)-")

($"/*-*$@)

– 37($H5%)#-&()<95#-%R%S)<"')+@<%((*$%)&+%)$'"+(0&<,9+)

F)$%+(*9+D=9'<%)IS)5"*()+"$&'%--%5%+$)="*("/-%)"M%<)1213Q)

:\)

1%(&'%)0%)-")#9(*,9+)

• !L9*R)0&)$'"+(0&<$%&')<"#"<*,=)>)<NRO)%($)

-*+@"*'%^+9+D-*+@"*'%)

• !L9*R)0%)-")5%(&'%)0*o@'%+,%--%^&+*#9-"*'%))

::)

1%(&'%)0%)-")#9(*,9+)

• !L9*R)0%)-")5%(&'%)0*o@'%+,%--%^&+*#9-"*'%))

• A%<L+*C&%)0%)-")5%(&'%)0%)-")<"#"<*$@)[))

:J)

1%(&'%)0%)-")#9(*,9+)

• 1%(&'%)0%)<"#"<*$@)F)&+*#9-"*'%)I)>)

"5#-*p<"$%&')0%)$'"+(*5#@0"+<%))

• `+)5%(&'%)-")M*$%((%)%$)+9+)#"()-")#9(*,9+)(*)

q()%($)&+%)(9&'<%)4!a)) :W)

1%(&'%)0%)-")#9(*,9+)

• 1%(&'%)0%)<"#"<*$@)F)&+*#9-"*'%)I)>)

"5#-*p<"$%&')0%)$'"+(*5#@0"+<%))

• B<*S)q()%($)U!S)9+)5%(&'%)-")#9(*,9+)a))

• r)C&9*)(%'$)-")'@(*($"+<%)?])[))

:Z)

1%(&'%)0%)-")#9(*,9+)

• 1%(&'%)0%)<"#"<*$@)F)&+*#9-"*'%)I)>)<"#"<*$@()

<955&$@%())

• s:S)sJ)>)-%()L9'-9P%()%+)9##9(*,9+)0%)#L"(%))

• 1%(&'%)0*'%<$%)0%)-")<"#"<*$@)a)B+(%+(*/-%).)-")

<"#"<*$@)#"'"(*$%)

)

:_)

1%(&'%)0%)-")#9(*,9+)

• 1%(&'%)0%)<"#"<*$@)F)&+*#9-"*'%)I)>)0@$%<,9+)

(7+<L'9+%)

• KG"M"+$"P%)>)'@<&#@'",9+)0&)(*P+"-)).)/"((%)

='@C&%+<%S)$'H()p"/-%))

• KG*+<9+M@+*%+$)>)+@<%((*$%)&+)p-$'%)"+"-9P*C&%)

:b)

1%(&'%)0%)-")#9(*,9+)

• 1%(&'%)0%)<"#"<*$@)F)0*o@'%+,%--%)I)>)#'*+<*#%))

Sensors 2013, 13 5725

another output node. With this strategy and external swapped wirings, a full sensing bridge can be

constructed, as described in the following paragraphs. Figure 3(b) shows the cross-sectional view of

the combined layers for the mechanical connection of proof mass pieces (2) and (3). The gap between

the two diagonal pieces and the whole large piece are used for mechanical connection and electrical

isolation [14].

The inset in Figure 3(a) shows the connection of individual comb finger pairs. Connections of two

pairs of the sensing comb drives are illustrated. The two types of stator electrodes that are both

anchored to the substrate are electrically isolated from each other. The same type of stator electrodes

are electrically connected differently for differential sensing. As shown in the figure, while the two

lower stator electrodes in both pairs are directly connected using the nickel metal, the two upper stator

electrodes are electrically connected using the doped polysilicon layer underneath the structure

material. While the polysilicon layer is isolated from the lower electrodes, it is connected to the upper

electrodes in the anchor pads.

Figure 4. Electrical equivalent circuit for the common-centroid configuration of the

sensing capacitors.

Figure 5. Simplified equivalent circuit of the sensor.



out



out





C4b

C3b

C2a

C1b

C1a

C2b

C3a

C4a





out



out



1%(&'%)0*o@'%+,%--%)n)(9',%)&+*#9-"*'%)

1%(&'%)0*o@'%+,%--%)n)(9',%)0*o@'%+,%--%)

:f)

1%(&'%)0%)#9(*,9+))

• 1%(&'%)0*o@'%+,%--%)

)n)(9',%)&+*#9-"*'%)

• 1%(&'%)0*o@'%+,%--%)

)n)(9',%)0*o@'%+,%--%)

Figure 3.1: Schematic diagram of a reported capacitive microaccelerometer.

Figure 3.2: Schematic diagram of a fully-differential capacitive microaccelerometer.

At the sensor-IC interface, a switching architecture is devised such that the charge

amplifier can interface with “four” changing capacitances having one common node at

the proof mass (two increasing and two decreasing). The proof mass is tied to a DC

voltage at all times and is never switched, which reduces the switching noise. The

micro-gravity SOI accelerometer is fabricated through the backside dry-release

process introduced in Section 2.3. The SOI accelerometer is wirebonded to the

interface IC and characteristic results are obtained.